(Nikon Metrology: Brighton, MI) -- Nikon Metrology Inc. introduces the Confocal NEXIV-K6555 with advanced confocal metrology capabilities that provide new measurement possibilities for demanding applications. The Confocal NEXIV-K6555 incorporates the latest Confocal, image processing, and Through the Lens (TTL) laser technologies for faster and more accurate noncontact 3-D measurements on larger size substrates, probe cards, and other applications requiring large stage travel.

Nikon designed the Confocal NEXIV VMZ-K6555 with longer XY travel (650 mm × 550 mm) to cover the noncontact 3-D measurement requirements of larger substrates, such as recent cutting-edge interposer substrates and probe cards, with greater accuracy and faster measurement speed. In addition, the newly developed ZC objective lenses for height measurement can obtain height data for every pixel in the field of view in a single scan, allowing fast, accurate, repeatable, and reproducible wide-area height measurements.

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