The market for miniature, hybrid machines known as MEMS, which are microelectromechanical systems, is diversified, and the National Institute of Standards and Technology (NIST) has introduced a long-awaited measurement tool that will help designers, manufacturers, and customers see eye-to-eye on eight dimensional and material property measurements that are key to device performance.

The NIST-developed test chips (Reference Materials 8096 and 8097) are quality assurance tools that enable accurate, reliable comparisons of measurements on MEMS devices made with different equipment and by different labs or companies. These capabilities will make it easier to characterize and troubleshoot processes, calibrate instruments, and communicate among partners.

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