Acu-Gage Wins Patent for ACU-THIK Proprietary Thickness Measuring TechnologyCalculates wafer thickness across X/Y points to resolution and repeatability of 0.00025 mm/0.00001 in.
Tue, 01/02/2018 - 12:00
(Acu-Gage: Hudson, NH) -- Acu-Gage Systems has been awarded Patent No. 10,088,304 by the U.S. Patent and Trademark Office for its ACU-THIK precision thickness measuring system. All 21 patent claims were approved readily because there is no other…