The AFM Option for the ZEISS MERLIN series combines a high-end, atomic force microscope (AFM) with a scanning electron microscope (SEM) to produce in situ, high-resolution AFM measurements in the SEM. The combination opens up new possibilities for characterizing nanostructures.

With the AFM, accurate quantitative 3D topographical data in the sub-nanometer scale can be acquired. In addition, information about mechanical, electrical, and magnetic properties as well as chemical surface potential of nanostructures is accessible. The combination with the SEM allows users to set these analyses in relation to macroscopic dimensions in the sample. In this article, an experiment is described that demonstrates the power of the AFM/SEM combination for analyzing helium ion beam-exposed nanostructures.

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